Michael A. Helmbrecht (Iris AO, Inc.), Min He (Iris AO, Inc.), Carl Kempf (Iris AO, Inc.), Patrick Rhodes (Iris AO, Inc.)
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Abstract:
Adaptive-optical correction of atmospheric turbulence requires deformable mirrors with hundreds to thousands of actuators. Since May of 2008, Iris AO has been developing microelectromechanical systems (MEMS) fabrication processes to support the manufacture of 500-3000 actuator DMs. The DM technology is based on a proven, commercially available, 111-actuator, 37-piston/tip/tilt segment DM. This poster will present an overview of the MEMS design and will discuss challenges in scaling to DMs to thousands of actuators. It will show development progress towards building a 489-actuator, 163-PTT-segment DM. Finally, it will show preliminary results of a 925-segment actuator array.
Date of Conference: September 1-4. 2009
Track: