Michael A. Helmbrecht (Iris AO, Inc.), Min He (Iris AO, Inc.), Carl Kempf (Iris AO, Inc.), Nathan Doble (Iris AO, Inc.)
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Abstract:
This paper presents the Iris AO MEMS segmented DM technology to the AMOS community. The Iris AO 37-segment S37-X DM is a large stroke (5-10 μm), piston/tip/tilt device capable of many kilohertz operation. The DM is mated with high-resolution electronics and a calibrated position controller that enables precision open-loop operation using intuitive position commands. The robust design has shown excellent segment flatness over large temperature ranges. Actuator arrays have survived liquid-nitrogen temperatures as well, demonstrating possible use in cryogenic applications.
Date of Conference: September 16-19, 2008
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